356 / | HD | OPTICS: MEASURING AND TESTING |
237.1 | DF | INSPECTION OF FLAWS OR IMPURITIES {6} |
237.2 | .~ Surface condition {2} | |
237.3 | DF | .~.~> Detection of object or particle on surface {1} |
237.5 | DF | .~.~> On patterned or topographical surface (e.g., wafer, mask, circuit board) |