US PATENT SUBCLASS 356 / 237.3
.~.~ Detection of object or particle on surface

Current as of: June, 1999
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356 /   HD   OPTICS: MEASURING AND TESTING

237.1  DF  INSPECTION OF FLAWS OR IMPURITIES {6}
237.2  DF  .~ Surface condition {2}
237.3.~.~ Detection of object or particle on surface {1}
237.4  DF  .~.~.~> On patterned or topographical surface (e.g., wafer, mask, circuit board)

DEFINITION

Classification: 356/237.3

Detection of an object or particle on surface:

(under subclass 237.2) Inspection of surface condition wherein an article is examined for the existence of a contaminant residing on the veneer of the article.

SEE OR SEARCH THIS CLASS, SUBCLASS:

238.3, for the detection of foreign particles on or within a textile product.

239.5, for the detection of an object or particle in or on a transparent container.

239.8, for the detection of a foreign particle or object on the surface of a transparent article.

243.6, for a foreign object standard.

SEE OR SEARCH CLASS

250, Radiant Energy, 559.41, for a photocell with associated circuitry capable of identifying the presence of a foreign substance on or embedded in a material from variations in a detected light signal.