.~.~ On patterned or topographical surface (e.g., wafer, mask, circuit board)
DEFINITION
Classification: 356/237.5
On patterned or topos:graphical surface (e.g., wafer, mask, circuit board):
(under subclass 237.2) Inspection of surface condition wherein the inspected article further includes a motif or raised three dimensional configuration.
SEE OR SEARCH THIS CLASS, SUBCLASS:
243.7, for a standard for a surface further comprising texture.
SEE OR SEARCH CLASS
250, Radiant Energy,
559.44, for a photocell having a circuit producing an output indicating the presence or absence of a marking, pattern, or indicia on the surface of the material.
