US PATENT SUBCLASS 216 / 93
.~ Recycling, regenerating, or rejunevating etchant

Current as of: June, 1999
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216 /   HD   ETCHING A SUBSTRATE: PROCESSES

83  DF  NONGASEOUS PHASE ETCHING OF SUBSTRATE {9}
93.~ Recycling, regenerating, or rejunevating etchant

DEFINITION

Classification: 216/93

Recycling, regenerating, or rejuvenating etchant:

(under subclass 83) Process which includes the steps of reconstituing or reusing an etchant.

(1) Note. Removal of etchant from an etching bath and its return to an etching bath is considered recycling for this subclass.