US PATENT SUBCLASS 216 / 73
.~ Etching vapor produced by evaporation, boiling, or sublimation

Current as of: June, 1999
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216 /   HD   ETCHING A SUBSTRATE: PROCESSES

58  DF  GAS PHASE ETCHING OF SUBSTRATE {6}
73.~ Etching vapor produced by evaporation, boiling, or sublimation

DEFINITION

Classification: 216/73

Etching vapor produced by evaporation, boiling, or sublimation:

(under subclass 58) Process wherein the etching process includes the formation of the etchant vapor by the evaporating or boiling of a liquid, or is directly produced from a solid without the formation of a liquid phase.