US PATENT SUBCLASS 204 / 298.28
.~.~.~.~ Rotational movement


Current as of: June, 1999
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204 /   HD   CHEMISTRY: ELECTRICAL AND WAVE ENERGY

193  DF  APPARATUS {5}
298.01  DF  .~ Coating, forming or etching by sputtering {2}
298.02  DF  .~.~ Coating {13}
298.23  DF  .~.~.~ Moving workpiece or target {6}
298.28.~.~.~.~ Rotational movement


DEFINITION

Classification: 204/298.28

Rotational movement:

(under subclass 298.23) Apparatus including means for rotating the target or workpiece.