US PATENT SUBCLASS 204 / 298.26
.~.~.~.~ Plural diverse treatment stations, zones, or coating material source within single chamber

Current as of: June, 1999
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204 /   HD   CHEMISTRY: ELECTRICAL AND WAVE ENERGY

193  DF  APPARATUS {5}
298.01  DF  .~ Coating, forming or etching by sputtering {2}
298.02  DF  .~.~ Coating {13}
298.23  DF  .~.~.~ Moving workpiece or target {6}
298.26.~.~.~.~ Plural diverse treatment stations, zones, or coating material source within single chamber

DEFINITION

Classification: 204/298.26

Plural diverse treatment stations, zones, or coating material source within single chamber:

(under subclass 298.23) Apparatus including plural diverse treatment stations or zones (e.g., plural sputter coating stations, sputter coating and etching stations, or sputter coating and other pre-treatment or post-treatment stations, etc.) within a single chamber and means for moving at least one workpiece through the plurality of stations or zones.