US PATENT SUBCLASS 204 / 298.25
.~.~.~.~ Multi-chamber (e.g., including air lock, load/unload chamber, etc.)

Current as of: June, 1999
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204 /   HD   CHEMISTRY: ELECTRICAL AND WAVE ENERGY

193  DF  APPARATUS {5}
298.01  DF  .~ Coating, forming or etching by sputtering {2}
298.02  DF  .~.~ Coating {13}
298.23  DF  .~.~.~ Moving workpiece or target {6}
298.25.~.~.~.~ Multi-chamber (e.g., including air lock, load/unload chamber, etc.)

DEFINITION

Classification: 204/298.25

Multi-chamber (e.g., including air lock, load/unload chamber, etc.):

(under subclass 298.23) Apparatus including a plurality of distinct chambers or subchambers (e.g., air lock, loading or unloading chamber, plural diverse treatment chambers, etc.) and means for moving at least one workpiece through the plurality of chambers or subchambers.