204 / | HD | CHEMISTRY: ELECTRICAL AND WAVE ENERGY |
193 | DF | APPARATUS {5} |
298.01 | DF | .~ Coating, forming or etching by sputtering {2} |
298.02 | DF | .~.~ Coating {13} |
298.23 | DF | .~.~.~ Moving workpiece or target {6} |
298.24 | .~.~.~.~ Indeterminate length moving workpiece |