| 204 / | HD | CHEMISTRY: ELECTRICAL AND WAVE ENERGY |
| * | DD | PROCESSES AND PRODUCTS {7} |
| 192.1 | DF | .~ Coating, forming or etching by sputtering {3} |
| 192.12 | DF | .~.~ Glow discharge sputter deposition (e.g., cathode sputtering, etc.) {3} |
| 192.15 | DF | .~.~.~ Specified deposition material or use {10} |
| 192.22 | DF | .~.~.~.~ Insulator or dielectric {1} |
| 192.23 | | .~.~.~.~.~ Silicon containing |