| 118 / | HD | COATING APPARATUS |
| 715 | DF | GAS OR VAPOR DEPOSITION {9} |
| 722 | DF | .~ With treating means (e.g., jarring) {2} |
| 723 R | DF | .~.~ By creating electric field (e.g., gas activation, plasma, etc.) {8} |
| 723 E | DF | .~.~.~ Having glow discharge electrodes (e.g., DC, AC, RF, etc.) {1} |
| 723 ER | ![]() | .~.~.~.~ Producing energized gas remotely located from substrate |