118 / | HD | COATING APPARATUS |
715 | DF | GAS OR VAPOR DEPOSITION {9} |
722 | DF | .~ With treating means (e.g., jarring) {2} |
723 R | DF | .~.~ By creating electric field (e.g., gas activation, plasma, etc.) {8} |
723 E | .~.~.~ Having glow discharge electrodes (e.g., DC, AC, RF, etc.) {1} | |
723 ER | DF | .~.~.~.~> Producing energized gas remotely located from substrate |