US PATENT SUBCLASS 117 / 99
.~.~ With a chemical reaction (except ionization) in a disparate zone to form a precursor (e.g., transport processes)

Current as of: June, 1999
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117 /   HD   SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR

84  DF  FORMING FROM VAPOR OR GASEOUS STATE (E.G., VPE, SUBLIMATION) {8}
88  DF  .~ With decomposition of a precursor (except impurity or dopant precursor) composed of diverse atoms (e.g., CVD) {8}
99.~.~ With a chemical reaction (except ionization) in a disparate zone to form a precursor (e.g., transport processes) {1}
100  DF  .~.~.~> Fully-sealed or vacuum-maintained chamber (e.g., ampoule)

DEFINITION

Classification: 117/99

With a chemical reaction (except ionization) in a disparate zone to form a precursor (e.g., transport processes):

(under subclass 88) Subject matter including a step of forming a precursor*, including dopant* precursor*, by a chemical reaction* (except ionization) in a location separate from the deposition zone.

(1) Note. Not included here are processes in which the precursor* undergoes chemical reaction* immediately at the deposition zone.

(2) Note. Cross-referencing between this subclass and subclass 102 is not necessary when based on the same step or steps. However, when it is unclear, cross-referencing is appropriate.

SEE OR SEARCH THIS CLASS, SUBCLASS:

103, for similar processes involving ionization.