US PATENT SUBCLASS 117 / 100
.~.~.~ Fully-sealed or vacuum-maintained chamber (e.g., ampoule)

Current as of: June, 1999
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117 /   HD   SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR

84  DF  FORMING FROM VAPOR OR GASEOUS STATE (E.G., VPE, SUBLIMATION) {8}
88  DF  .~ With decomposition of a precursor (except impurity or dopant precursor) composed of diverse atoms (e.g., CVD) {8}
99  DF  .~.~ With a chemical reaction (except ionization) in a disparate zone to form a precursor (e.g., transport processes) {1}
100.~.~.~ Fully-sealed or vacuum-maintained chamber (e.g., ampoule)

DEFINITION

Classification: 117/100

Fully-sealed or vacuum-maintained chamber (e.g., ampoule):

(under subclass 99) Subject matter in which a sealed chamber (e.g., ampoule) is used or in which the only communication between a reaction chamber and the external environment is a vacuum-maintaining means.