US PATENT SUBCLASS 117 / 96
.~.~.~.~ For autodoping control

Current as of: June, 1999
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117 /   HD   SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR

84  DF  FORMING FROM VAPOR OR GASEOUS STATE (E.G., VPE, SUBLIMATION) {8}
88  DF  .~ With decomposition of a precursor (except impurity or dopant precursor) composed of diverse atoms (e.g., CVD) {8}
94  DF  .~.~ With pretreatment or preparation of a base (e.g., annealing) {2}
95  DF  .~.~.~ Coating (e.g., masking, implanting) {1}
96.~.~.~.~ For autodoping control

DEFINITION

Classification: 117/96

For autodoping control:

(under subclass 95) Subject matter in which there is a disclosed intent to control autodoping during growth by performing the coating.