US PATENT SUBCLASS 505 / 476
.~.~.~.~ RF sputtering (e.g., 13.56 MHz, etc.)

Current as of: June, 1999
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505 /   HD   SUPERCONDUCTOR TECHNOLOGY: APPARATUS, MATERIAL, PROCESS

300  DF  PROCESSES OF PRODUCING OR TREATING HIGH TEMPERATURE (Tc GREATER THAN 30 K) SUPERCONDUCTOR MATERIAL OR SUPERCONDUCTOR CONTAINING PRODUCTS OR PRECURSORS THEREOF {24}
470  DF  .~ Coating {3}
473  DF  .~.~ Vapor deposition {3}
475  DF  .~.~.~ Sputtering {1}
476.~.~.~.~ RF sputtering (e.g., 13.56 MHz, etc.)

DEFINITION

Classification: 505/476

RF sputtering (e.g., 13.56 MHz, etc.):

(under subclass 475) Process wherein radio frequency electromagnetic wave energy (e.g., 13.65 MHz, etc.) is utilized to energize the sputtering operation.