US PATENT SUBCLASS 505 / 475
.~.~.~ Sputtering

Current as of: June, 1999
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505 /   HD   SUPERCONDUCTOR TECHNOLOGY: APPARATUS, MATERIAL, PROCESS

300  DF  PROCESSES OF PRODUCING OR TREATING HIGH TEMPERATURE (Tc GREATER THAN 30 K) SUPERCONDUCTOR MATERIAL OR SUPERCONDUCTOR CONTAINING PRODUCTS OR PRECURSORS THEREOF {24}
470  DF  .~ Coating {3}
473  DF  .~.~ Vapor deposition {3}
475.~.~.~ Sputtering {1}
476  DF  .~.~.~.~> RF sputtering (e.g., 13.56 MHz, etc.)

DEFINITION

Classification: 505/475

Sputtering:

(under subclass 473) Process wherein a target is bombarded by ions in a vacuum to remove material from the target by momentum transfer and to deposit the material as a coating on a substrate.