US PATENT SUBCLASS 438 / FOR 388
.~ Coating and etching (437/228)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

FOR 385  DF  INCLUDING COATING OR MATERIAL REMOVAL, E.G., ETCHING, GRINDING, ETC. (437/ 225) {9}
FOR 388.~ Coating and etching (437/228)

DEFINITION

Classification: 438/FOR.388

Coating and etching:

Foreign art collection for processes having both the step of coating and etching regardless of the order of occurrence of the steps.