438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 301 | DF | .~ Diffusing a dopant (437/141) {17} |
FOR 318 | .~.~ Edge diffusion by using edge portion of structure other than masking layer to mask (437/158) |