438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 301 | DF | .~ Diffusing a dopant (437/141) {17} |
FOR 313 | DF | .~.~ Single dopant forming plural diverse regions (437/153) {1} |
FOR 314 | .~.~.~ Forming regions of different concentrations or different depths (437/154) |