438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 301 | DF | .~ Diffusing a dopant (437/141) {17} |
FOR 310 | DF | .~.~ Plural dopants in same region, e.g., through same mask opening, etc. (437/150) {1} |
FOR 311 | .~.~.~ Simultaneously (437/151) |