438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 301 | DF | .~ Diffusing a dopant (437/141) {17} |
FOR 307 | .~.~ Using multiple layered mask (437/147) {1} | |
FOR 308 | DF | .~.~.~> Having plural predetermined openings in master mask (437/148) |