US PATENT SUBCLASS 438 / FOR 146
.~ By layers which are coated, contacted, or diffused (437/12)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

FOR 144  DF  INCLUDING GETTERING (437/10) {3}
FOR 146.~ By layers which are coated, contacted, or diffused (437/12)

DEFINITION

Classification: 438/FOR.146

By layers which are coated, contacted, or diffused:

Foreign art collection for subject matter wherein the substrate is exposed to a specified material by (1) depositing a layer of the material on the substrate, (2) physically contacting the substrate with the material or (3) performing a diffusion operation to form a gettering layer in the substrate.