US PATENT SUBCLASS 438 / FOR 145
.~ By ion implanting or irradiating (437/11)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

FOR 144  DF  INCLUDING GETTERING (437/10) {3}
FOR 145.~ By ion implanting or irradiating (437/11)

DEFINITION

Classification: 438/FOR.145

By ion implanting or irradiating:

Foreign art collection for subject matter wherein the substrate is exposed to ion beams or wave energy to create lattice defects which act as trapping sites or to enhance the movement of undesired impurities out of a given semiconductor area.