438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
983 | DF | ZENER DIODES {1} |
FOR 100 | DF | .~ Etching of semiconductor precursor, substrates, and devices used in an electrical function (156/625.1) {17} |
FOR 134 | .~.~ Silicon, germanium, or gallium containing substrate (156/662.1) |