| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 983 | DF | ZENER DIODES {1} |
| FOR 100 | DF | .~ Etching of semiconductor precursor, substrates, and devices used in an electrical function (156/625.1) {17} |
| FOR 122 | ![]() | .~.~ Etching isolates or modifies a junction in a barrier layer (156/648.1) {1} |
| FOR 123 | DF | .~.~.~> Discrete junction isolated (e.g., mesa formation, etc.) (156/649.1) |