US PATENT SUBCLASS 438 / FOR 116
.~.~ Recycling or regenerating etchant (156/642.1)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

983  DF  ZENER DIODES {1}
FOR 100  DF  .~ Etching of semiconductor precursor, substrates, and devices used in an electrical function (156/625.1) {17}
FOR 116.~.~ Recycling or regenerating etchant (156/642.1)

DEFINITION

Classification: 438/FOR.116

Recycling or regenerating etchant:

Foreign art collection for processes which include the step of reconstituting or reusing an etchant or wherein, the etchant is removed from an etching bath and is returned to an etching bath for further use.