438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
983 | DF | ZENER DIODES {1} |
FOR 100 | DF | .~ Etching of semiconductor precursor, substrates, and devices used in an electrical function (156/625.1) {17} |
FOR 104 | DF | .~.~ With uniting of preforms (e.g., laminating, etc.) (156/629.1) {2} |
FOR 105 | .~.~.~ Prior to etching (156/630.1) {2} | |
FOR 106 | DF | .~.~.~.~> Delamination subsequent to etching (156/631.1) |
FOR 107 | DF | .~.~.~.~> With coating (156/632.1) |