US PATENT SUBCLASS 438 / 925
.~ Fluid growth doping control (e.g., delta doping, etc.)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

914  DF  DOPING {11}
925.~ Fluid growth doping control (e.g., delta doping, etc.)

DEFINITION

Classification: 438/925

Fluid growth doping control (e.g., delta doping, etc.):

Art collection under 914 involving regulating the dopant concentration during the fluid growth of material upon the substrate.