US PATENT SUBCLASS 438 / 924
.~ To facilitate selective etching

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

914  DF  DOPING {11}
924.~ To facilitate selective etching

DEFINITION

Classification: 438/924

To facilitate selective etching:

Art collection under 914 involving doping selected regions of the semiconductor substrate to alter the etchibility of the doped regions.