US PATENT SUBCLASS 438 / 923
.~ Diffusion through a layer
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
914
DF
DOPING
{11}
923
.~ Diffusion through a layer
DEFINITION
Classification: 438/923
Diffusion through a layer:
Art collection under 914 involving diffusing a dopant in a perpendicular manner through a layer of material.