US PATENT SUBCLASS 438 / 922
.~ Diffusion along grain boundaries

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

914  DF  DOPING {11}
922.~ Diffusion along grain boundaries

DEFINITION

Classification: 438/922

Diffusion along grain boundaries:

Art collection under 914 involving diffusion between the grains of nonsingle crystalline material along the physical interface of two layers.