US PATENT SUBCLASS 438 / 920
.~ Controlling diffusion profile by oxidation

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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

914  DF  DOPING {11}
920.~ Controlling diffusion profile by oxidation

DEFINITION

Classification: 438/920

Controlling diffusion profile by oxidation:

Art collection under 914 involving the regulation of a diffusion contour by an oxidation step.