US PATENT SUBCLASS 438 / 916
.~ Autodoping control or utilization

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

914  DF  DOPING {11}
916.~ Autodoping control or utilization

DEFINITION

Classification: 438/916

Autodoping control or utilization:

Art collection under 914 involving the regulation of self-induced impurity production in a semiconductor substrate.