US PATENT SUBCLASS 438 / 915
.~ Amphoteric doping
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
914
DF
DOPING
{11}
915
.~ Amphoteric doping
DEFINITION
Classification: 438/915
Amphoteric doping:
Art collection under 914 involving use of a dopant capable of
functioning as a P- or N-type conductivity modifier depending on process conditions.