US PATENT SUBCLASS 438 / 908
.~ Utilizing cluster apparatus


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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

907  DF  CONTINUOUS PROCESSING {1}
908.~ Utilizing cluster apparatus


DEFINITION

Classification: 438/908

Utilizing cluster apparatus:

(under subclass 907) Art collection wherein the continuous processing is conducted in an apparatus having a plurality of processing chambers having associated handling means to move the semiconductor substrate therebetween.