US PATENT SUBCLASS 438 / 908
.~ Utilizing cluster apparatus

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

907  DF  CONTINUOUS PROCESSING {1}
908.~ Utilizing cluster apparatus

DEFINITION

Classification: 438/908

Utilizing cluster apparatus:

(under subclass 907) Art collection wherein the continuous processing is conducted in an apparatus having a plurality of processing chambers having associated handling means to move the semiconductor substrate therebetween.