US PATENT SUBCLASS 438 / 907
CONTINUOUS PROCESSING

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

907CONTINUOUS PROCESSING {1}
908  DF  .~> Utilizing cluster apparatus

DEFINITION

Classification: 438/907

CONTINUOUS PROCESSING:

Art collection involving carrying out process steps in semiconductor manufacture in a continual manner.