| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 795 | DF | RADIATION OR ENERGY TREATMENT MODIFYING PROPERTIES OF SEMICONDUCTOR REGION OF SUBSTRATE (E.G., THERMAL, CORPUSCULAR, ELECTROMAGNETIC, ETC.) {3} |
| 796 | | .~ Compound semiconductor {1} |
| 797 | DF | .~.~> Ordering or disordering |