US PATENT SUBCLASS 438 / 759
.~ Combined with the removal of material by nonchemical means

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

758  DF  COATING OF SUBSTRATE CONTAINING SEMICONDUCTOR REGION OR OF SEMICONDUCTOR SUBSTRATE {6}
759.~ Combined with the removal of material by nonchemical means

DEFINITION

Classification: 438/759

Combined with the removal of material by nonchemical means:

(under subclass 758) Processes having an additional step of removing material from the semiconductor substrate by nonchemical means (e.g., ablating, abrading, grinding, etc.)