US PATENT SUBCLASS 438 / 684
.~.~ Electrically conductive polysilicon

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
684.~.~ Electrically conductive polysilicon

DEFINITION

Classification: 438/684

Electrically conductive polysilicon:

(under subclass 597) Processes for forming a contact using electrically conductive polycrystalline silicon.