US PATENT SUBCLASS 438 / 679
.~.~ Evaporative coating of conductive layer

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
679.~.~ Evaporative coating of conductive layer

DEFINITION

Classification: 438/679

Evaporative coating of conductive layer:

(under subclass 597) Processes wherein the formation of the conductive layer is accomplished through the evaporation of the conductive material from a source and the deposition of the same on the semiconductive substrate.