US PATENT SUBCLASS 438 / 607
.~.~ With epitaxial conductor formation

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
607.~.~ With epitaxial conductor formation

DEFINITION

Classification: 438/607

With epitaxial conductor formation:

(under subclass 597) Processes involving the formation of an epitaxial conductive layer in ohmic electrical contact to a semiconductor region.

SEE OR SEARCH CLASS

117, Single-Crystal, Oriented Crystal, and Epitaxy Growth Processes: Non-Coating Apparatus Therefor, appropriate subclasses for a process of forming an epitaxial layer upon a substrate.