438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
584 | DF | COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2} |
597 | DF | .~ To form ohmic contact to semiconductive material {24} |
602 | DF | .~.~ To compound semiconductor {2} |
604 | DF | .~.~.~ III-V compound semiconductor {2} |
606 | .~.~.~.~ Ga and As containing semiconductor |