US PATENT SUBCLASS 438 / 605
.~.~.~.~ Multilayer electrode


Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use



438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
602  DF  .~.~ To compound semiconductor {2}
604  DF  .~.~.~ III-V compound semiconductor {2}
605.~.~.~.~ Multilayer electrode


DEFINITION

Classification: 438/605

Multilayer electrode:

(under subclass 604) Processes wherein the ohmic contact is composed of plural layers.