| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 584 | DF | COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2} |
| 585 | DF | .~ Insulated gate formation {7} |
| 595 | ![]() | .~.~ Having sidewall structure {1} |
| 596 | DF | .~.~.~> Portion of sidewall structure is conductive |