438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
584 | DF | COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2} |
585 | DF | .~ Insulated gate formation {7} |
595 | .~.~ Having sidewall structure {1} | |
596 | DF | .~.~.~> Portion of sidewall structure is conductive |