US PATENT SUBCLASS 438 / 594
.~.~.~.~ Tunnelling dielectric layer

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
585  DF  .~ Insulated gate formation {7}
592  DF  .~.~ Possessing plural conductive layers (e.g., polycide) {1}
593  DF  .~.~.~ Separated by insulator (i.e., floating gate) {1}
594.~.~.~.~ Tunnelling dielectric layer

DEFINITION

Classification: 438/594

Tunnelling dielectric layer:

(under subclass 593) Processes wherein the intervening dielectric allows for the migration of charge carriers therethrough.