US PATENT SUBCLASS 438 / 554
.~.~ Outwardly

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
542  DF  .~ Diffusing a dopant {15}
554.~.~ Outwardly

DEFINITION

Classification: 438/554

Outwardly:

(under subclass 542) Processes wherein the electrically active impurity moves from an internal location toward the major surface of the semiconductor substrate.