US PATENT SUBCLASS 438 / 550
.~.~ Nonuniform heating
Current as of:
June, 1999
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438 /
HD
SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
510
DF
INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL
{7}
542
DF
.~ Diffusing a dopant {15}
550
.~.~ Nonuniform heating
DEFINITION
Classification: 438/550
Nonuniform heating:
(under subclass 542) Processes including the nonuniform application of thermal energy to the semiconductor substrate (e.g., heating distinct areas as opposed to heating the entire substrate, etc.).
