US PATENT SUBCLASS 438 / 549
.~.~ Single dopant forming plural diverse regions (e.g., forming regions of different concentrations or of different depths, etc.)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
542  DF  .~ Diffusing a dopant {15}
549.~.~ Single dopant forming plural diverse regions (e.g., forming regions of different concentrations or of different depths, etc.)

DEFINITION

Classification: 438/549

Single dopant forming plural diverse regions (e.g., forming regions of different concentrations or of different depths, etc.):

(under subclass 542) Processes for permeating an electrically active impurity into multiple different localized areas which differ in the amount of impurity, the distance the impurity has to travel inwardly from the surface, or the like.