US PATENT SUBCLASS 438 / 548
.~.~ Plural dopants simultaneously in plural regions

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
542  DF  .~ Diffusing a dopant {15}
548.~.~ Plural dopants simultaneously in plural regions

DEFINITION

Classification: 438/548

Plural dopants simultaneously in plural regions:

(under subclass 542) Processes for permeating multiple electrically active impurities in multiple localized areas.